Innovation and Manufacturing Excellence in Mature Multi-Product Semiconductor Fabrication Facilities via Design by 3
Research output: Contribution to conferences › Paper › Contributed › peer-review
Contributors
Details
| Original language | English |
|---|---|
| Pages | 1-5 |
| Number of pages | 5 |
| Publication status | Published - 2011 |
| Peer-reviewed | Yes |
External IDs
| ORCID | /0000-0001-6942-3763/work/142252819 |
|---|
Keywords
Keywords
- Logistik