Influence of sputtering pressure on the nanostructure and the X-ray reflectivity of iridium coatings

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • A. -C. Probst - (Author)
  • M. Stollenwerk - (Author)
  • F. Emmerich - (Author)
  • A. Buettner - (Author)
  • S. Zeising - (Author)
  • J. Stadtmueller - (Author)
  • F. Riethmueller - (Author)
  • V. Stehlikova - (Author)
  • M. Wen - (Author)
  • L. Proserpio - (Author)
  • C. Damm - (Author)
  • B. Rellinghaus - , Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • T. Doehring - (Author)

Details

Original languageEnglish
Pages (from-to)101-107
Number of pages7
JournalSurface and Coatings Technology
Volume343
Issue numberSI
Publication statusPublished - 15 Jun 2018
Peer-reviewedYes
Externally publishedYes

External IDs

Scopus 85033571494

Keywords