How to improve the uniformity of metal deposition at vertical electrodes by electromagnetic forces

Research output: Contribution to conferences › Paper › Contributed

Contributors

  • G. Mutschke - (Author)
  • S. Mühlenhoff - (Author)
  • R. Selent - (Author)
  • X. Yang - (Author)
  • M. Uhlemann - (Author)
  • J. Fröhlich - (Author)
  • S. Odenbach - (Author)
  • K. Eckert - (Author)

Details

Original languageEnglish
Publication statusPublished - 2014
Peer-reviewedNo