Gate-controlled superconductivity and quantum interference in 300 mm CMOS-compatible ZrN nanostructures

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Roman Potjan - , Chair of Physics of High Magnetic Fields, Fraunhofer Institute for Photonic Microsystems (Author)
  • Oliver Ostien - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Marcus Wislicenus - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Raik Hoffmann - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Katharina Lilienthal - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Kilian Heidner - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Felix Mende - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Sergej Liberda - , Fraunhofer Institute for Photonic Microsystems (Author)
  • André Reck - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Varvara Brackmann - , Fraunhofer Institute for Photonic Microsystems (Author)
  • Benjamin Lilienthal-Uhlig - , Fraunhofer Institute for Photonic Microsystems (Author)
  • J. Wosnitza - , Chair of Physics of High Magnetic Fields, Helmholtz-Zentrum Dresden-Rossendorf (HZDR) (Author)

Abstract

The interplay of alternative materials, large-scale integration technologies, and innovative devices plays a pivotal role on the way to fault-tolerant quantum computing. In this context, gate-controlled superconductivity (GCS) emerges as a key enabling technology, promising to advance superconducting logic and quantum electronics, complementing conventional approaches based on Josephson effects and quantum interference. Here, we demonstrate all-metallic superconducting ZrN nanostructures on silicon, fabricated entirely using a subtractive, monolithic dry-etch approach with a 300 mm CMOS-compatible process flow. For Dayem-bridge weak links with decreasing width down to 27 nm, we observe Tc of 7.3 K, width-dependent switching characteristics, and a progressive approach of the tunneling limit. In laterally gated Dayem-bridge and nanowire devices, we observe GCS with full suppression of the critical current, where required gate voltages < 5 V promise compatibility with CMOS interfaces. Asymmetries in polarity-dependent power injection via field emission support GCS models that attribute the effect to quasiparticle relaxation through phonon emission. Additional asymmetries in the GCS effect suggest an influence of the substrate condition after dry etching. Field emission features in the gated nanowire device imply superimposed current paths along the gate edge and corners. Finally, we analyze magnetic interference in Dayem-bridge weak links and superconducting quantum interference devices, where quantum interference is governed by Josephson effects and inductance loop asymmetries. Our results contribute to the scaling efforts in hybrid superconducting electronics and quantum-processing units.

Details

Original languageEnglish
Article number051103
Number of pages14
JournalAPL materials
Volume13
Issue number5
Publication statusPublished - 1 May 2025
Peer-reviewedYes

Keywords