Flexible photonic devices based on dielectric antennas

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Abdennacer Benali - , Aix-Marseille Université (Author)
  • Jean-Benoit Claude - , Aix-Marseille Université (Author)
  • Nicoletta Granchi - , European Lab Nonlinear Spect LENS (Author)
  • Simona Checcucci - , European Lab Nonlinear Spect LENS (Author)
  • Mohammed Bouabdellaoui - , University of Hassan II Casablanca (Author)
  • Mimoun Zazoui - , University of Hassan II Casablanca (Author)
  • Monica Bollani - , CNR, Consiglio Nazionale delle Ricerche (CNR), Ist Foton & Nanotecnol, LNESS (Author)
  • Marco Salvalaglio - , TUD Dresden University of Technology (Author)
  • Jerome Wenger - , Aix-Marseille Université (Author)
  • Luc Favre - , Aix-Marseille Université (Author)
  • David Grosso - , Aix-Marseille Université (Author)
  • Antoine Ronda - , Aix-Marseille Université (Author)
  • Isabelle Berbezier - , Aix-Marseille Université (Author)
  • Massimo Gurioli - , University of Florence (Author)
  • Marco Abbarchi - , Aix-Marseille Université (Author)

Abstract

Flexible and stretchable photonics are emerging fields aiming to develop novel applications where the devices need to conform to uneven surfaces or whenever lightness and reduced thickness are major requirements. However, owing to the relatively small refractive index of transparent soft matter including most polymers, these materials are not well adapted for light management at visible and near-infrared frequencies. Here we demonstrate simple, low cost and efficient protocols for fabricating Si1-xGex-based, sub-micrometric dielectric antennas over record scales (50 mm wafers) with ensuing hybrid integration into different plastic supports. The transfer process has a near-unity yield: up to 99.94% for disordered structures and 99.5% for the ordered counterpart. Finally, we benchmark the optical quality of the dielectric antennas with light scattering measurements, demonstrating the control of the islands structural color and the onset of sharp Mie modes after encapsulation in plastic. Thanks to the ease of implementation of our fabrication methods, these results are relevant for the integration of SiGe-based dielectric Mie resonators in flexible substrates over large surfaces.

Details

Original languageEnglish
Article number015002
Number of pages10
Journal JPhys photonics
Volume2
Issue number1
Publication statusPublished - Jan 2020
Peer-reviewedYes
Externally publishedYes

External IDs

Scopus 85091678991
ORCID /0000-0002-4217-0951/work/142237404

Keywords

Keywords

  • Mie resonator, silicon on insulator, flexible photonics, solide state dewetting, antennas, silicon-germanium, light scattering, SILICON, RESONATORS