Fabrication of high-Q multimode microring resonators on a photonic silicon-on-insulator platform

Research output: Contribution to book/conference proceedings/anthology/reportConference contributionContributedpeer-review

Contributors

Abstract

This work reports on the fabrication and optimization of silicon microring resonators on SOI platforms with a focus on rapid device prototyping. Such resonators are instrumental in expanding the functionality of photonic circuits, be it by leveraging the inherent nonlinearities of silicon or by improving frequency filtering. Central to this investigation is the detailed fabrication techniques developed for SOI waveguides, specifically tailored to minimize losses. Devices are created using Electron Beam Lithography and are etched using Reactive Ion Etching. The performance of microrings with single-mode waveguides is compared with that of multimode variants, and it is shown that the latter mitigate the impact of sidewall roughness, thereby reducing scattering losses. Through optimization of the patterning parameters, etching recipes and thermal treatment, developed devices exhibit propagation losses as low as 0.28

Details

Original languageEnglish
Title of host publicationIntegrated Photonics Platforms III
EditorsRoel G. Baets, Peter O'Brien, Laurent Vivien
PublisherSPIE - The international society for optics and photonics, Bellingham
ISBN (electronic)9781510673427
Publication statusPublished - 2024
Peer-reviewedYes

Publication series

SeriesProceedings of SPIE - The International Society for Optical Engineering
Volume13012
ISSN0277-786X

Conference

TitleIntegrated Photonics Platforms III 2024
Duration7 - 10 April 2024
CityStrasbourg
CountryFrance

Keywords

Keywords

  • low-loss waveguide, microresonators, photonic integrated circuits, silicon photonics, SOI waveguide