Fabrication of Highly n-Type-Doped Germanium Nanowires and Ohmic Contacts Using Ion Implantation and Flash Lamp Annealing

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Ahmad Echresh - , Institute of Applied Physics, Chair of Semiconductor Spectroscopy, Helmholtz-Zentrum Dresden-Rossendorf (Author)
  • Slawomir Prucnal - , Helmholtz-Zentrum Dresden-Rossendorf (Author)
  • Zichao Li - , Helmholtz-Zentrum Dresden-Rossendorf (Author)
  • René Hübner - , Helmholtz-Zentrum Dresden-Rossendorf (Author)
  • Fabian Ganss - , Helmholtz-Zentrum Dresden-Rossendorf (Author)
  • Oliver Steuer - , Helmholtz-Zentrum Dresden-Rossendorf (Author)
  • Florian Bärwolf - , Leibniz Institute for High Performance Microelectronics (Author)
  • Shima Jazavandi Ghamsari - , Helmholtz-Zentrum Dresden-Rossendorf (Author)
  • Manfred Helm - , Institute of Applied Physics, Chair of Semiconductor Spectroscopy, Helmholtz-Zentrum Dresden-Rossendorf (Author)
  • Shengqiang Zhou - , Helmholtz-Zentrum Dresden-Rossendorf (Author)
  • Artur Erbe - , Center for Advancing Electronics Dresden (cfaed), Helmholtz-Zentrum Dresden-Rossendorf (Author)
  • Lars Rebohle - , Helmholtz-Zentrum Dresden-Rossendorf (Author)
  • Yordan M. Georgiev - , Helmholtz-Zentrum Dresden-Rossendorf, Bulgarian Academy of Sciences (Author)

Abstract

Accurate control of doping and fabrication of metal contacts on n-type germanium nanowires (GeNWs) with low resistance and linear characteristics remain a major challenge in germanium-based nanoelectronics. Here, we present a combined approach to fabricate Ohmic contacts on n-type-doped GeNWs. Phosphorus (P) implantation, followed by millisecond rear-side flash lamp annealing, was used to produce highly n-type-doped Ge with an electron concentration in the order of 1019-1020cm-3. Electron beam lithography, inductively coupled plasma reactive ion etching, and nickel (Ni) deposition were used to fabricate GeNW-based devices with a symmetric Hall bar configuration, which allows detailed electrical characterization of the NWs. Afterward, rear-side flash lamp annealing was applied to form Ni germanide at the Ni-GeNW contacts to reduce the Schottky barrier height. The two-probe current-voltage measurements on n-type-doped GeNWs exhibit linear Ohmic behavior. Also, the size-dependent electrical measurements showed that carrier scattering near the NW surfaces and reduction of the effective NW cross-section dominate the charge transport in the GeNWs.

Details

Original languageEnglish
Pages (from-to)5256-5266
Number of pages11
JournalACS applied electronic materials
Volume4
Issue number11
Publication statusPublished - 22 Nov 2022
Peer-reviewedYes

Keywords

Keywords

  • flash lamp annealing, germanium nanowires, Hall bar configuration, ion implantation, n-type-doped, Ohmic contacts

Library keywords