Fabrication of Highly n-Type-Doped Germanium Nanowires and Ohmic Contacts Using Ion Implantation and Flash Lamp Annealing
Research output: Contribution to journal › Research article › Contributed › peer-review
Contributors
Abstract
Accurate control of doping and fabrication of metal contacts on n-type germanium nanowires (GeNWs) with low resistance and linear characteristics remain a major challenge in germanium-based nanoelectronics. Here, we present a combined approach to fabricate Ohmic contacts on n-type-doped GeNWs. Phosphorus (P) implantation, followed by millisecond rear-side flash lamp annealing, was used to produce highly n-type-doped Ge with an electron concentration in the order of 1019-1020cm-3. Electron beam lithography, inductively coupled plasma reactive ion etching, and nickel (Ni) deposition were used to fabricate GeNW-based devices with a symmetric Hall bar configuration, which allows detailed electrical characterization of the NWs. Afterward, rear-side flash lamp annealing was applied to form Ni germanide at the Ni-GeNW contacts to reduce the Schottky barrier height. The two-probe current-voltage measurements on n-type-doped GeNWs exhibit linear Ohmic behavior. Also, the size-dependent electrical measurements showed that carrier scattering near the NW surfaces and reduction of the effective NW cross-section dominate the charge transport in the GeNWs.
Details
Original language | English |
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Pages (from-to) | 5256-5266 |
Number of pages | 11 |
Journal | ACS applied electronic materials |
Volume | 4 |
Issue number | 11 |
Publication status | Published - 22 Nov 2022 |
Peer-reviewed | Yes |
Keywords
ASJC Scopus subject areas
Keywords
- flash lamp annealing, germanium nanowires, Hall bar configuration, ion implantation, n-type-doped, Ohmic contacts