Ein generisches Standardmodell zur Simulation spurgebundener Transportsysteme in der Halbleiterindustrie
Research output: Contribution to conferences › Paper › Contributed › peer-review
Contributors
Details
| Original language | German |
|---|---|
| Publication status | Published - 2015 |
| Peer-reviewed | Yes |
Symposium
| Title | ASIM Dedicated Conference on Simulation in Production and Logistics 2015 |
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| Conference number | 16 |
| Duration | 23 - 25 September 2015 |
| Website | |
| Degree of recognition | International event |
| Location | Technische Universität Dortmund |
| City | Dortmund |
| Country | Germany |
External IDs
| ORCID | /0000-0002-1484-7187/work/142243058 |
|---|
Keywords
Keywords
- Materialflusssimulation, Halbleiter, generisches Modell