Effect of interface roughness on acoustic loss in tunable thin film bulk acoustic wave resonators

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

  • Andrei Vorobiev - (Author)
  • John Berge - (Author)
  • Spartak Gevorgian - (Author)
  • Markus Löffler - , Chalmers University of Technology (Author)
  • Eva Olsson - (Author)

Details

Original languageEnglish
Pages (from-to)024116
Number of pages1
JournalJournal of applied physics
Volume110
Issue number2
Publication statusPublished - 2011
Peer-reviewedYes
Externally publishedYes

External IDs

Scopus 79961121703

Keywords