Ion implantation and plasma technologies have been proved to be useful techniques to control structure and surface properties of titanium-based materials. In this work the different properties such as microstructure, phase and element composition, microhardness and their influence on the biocompatibility of Ti-based coatings (pure Ti, nitride, oxide, oxynitride) produced by metal plasma immersion ion implantation and deposition (MePIIID) were investigated. The phase composition and correspondingly surface properties of the layers were strongly dependent on the partial pressure of the working gases (oxygen and/or nitrogen) in the vacuum chamber. Very homogenous deposition of the stoichiometric hydroxyapatite in simulated body fluid (SBF) on Ti-based layers, produced with MePIIID technology have been found for the Ti oxynitride coating with average atomic composition TiN_0.4O_1.6, consisting mainly of amorphous Ti oxide with nitrogen substitution.