Depth Profiling of Hardness and Young’s Modulus in Thin Films

Research output: Contribution to journal › Research article › Contributed › peer-review

Contributors

Details

Original languageEnglish
Pages (from-to)365-368
Number of pages4
JournalFine Mechanics and Optics
Volume2001
Issue number12
Publication statusPublished - 2001
Peer-reviewedYes

External IDs

ORCID /0000-0002-7062-9598/work/222761374