Validation of statistically confirmed geometrical models of the human inner ear requires precise image data of bony structures and soft tissue. By optimization and application of our Industrial High Resolution Micro Computer Tomograph (microCT, Fraunhofer IZFP), we achieve an image quality known so far only from synchrotron X-ray tomography. To improve the generation of X-ray photons, the micro focus X-ray tube was equipped with a high performance transmission target with diamond carrier to achieve a higher photon flux at the same focal diameter. Additionally, our new alignment tool allows post-acquisition correction of adjustment incorrectness which plays a key role in reconstruction of high resolution microCT-data. However, an accurate segmentation of the cochlea is still problematic due to the low X-ray absorption contrast of the inner membranes of scalae. To solve this problem, the soft tissue was stained by putting the specimen into an iodine solution. The resulting data are of outstanding quality and provide the basin for an extensive anatomical study and further development of statistical geometrical models of the human inner ear.