Crystalline phase control of ferroelectric HfO2 thin film via heterogeneous co-doping

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • S. Yang - , Professor (rtd.) of Solid-State Electronics, Fraunhofer Institute for Photonic Microsystems (Author)
  • D. Lehninger - , Fraunhofer Institute for Photonic Microsystems (Author)
  • A. Sünbül - , Fraunhofer Institute for Photonic Microsystems (Author)
  • F. Schöne - , Fraunhofer Institute for Photonic Microsystems (Author)
  • A. Reck - , Fraunhofer Institute for Photonic Microsystems (Author)
  • K. Seidel - , Fraunhofer Institute for Photonic Microsystems (Author)
  • G. Gerlach - , Professor (rtd.) of Solid-State Electronics (Author)
  • M. Lederer - , Fraunhofer Institute for Photonic Microsystems (Author)

Abstract

Our study investigates heterogeneous co-doped HfO2 thin films integrated into metal-ferroelectric-metal stacks, achieved by incorporating multiple layers doped with various species during the atomic layer deposition process. This approach creates an artificial crystallization temperature gradient across the HfO2 film, influencing the preferred nucleation sites of HfO2 during rapid thermal processing. Our findings demonstrate that the phase composition of the annealed HfO2 film is primarily determined by heterogeneous or homogeneous crystallization processes. In cases of heterogeneous crystallization, where crystallization initiates from nuclei formed at electrode/HfO2 interfaces, grains predominantly crystallize in the orthorhombic phase. Conversely, grains are more likely to crystallize in the monoclinic phase if they originate from nuclei formed at the center of the HfO2 film. Additionally, we observe correlations between the texture of the HfO2 film and the texture of the electrodes.

Details

Original languageEnglish
Article number132903
JournalApplied physics letters
Volume125
Issue number13
Publication statusPublished - 23 Sept 2024
Peer-reviewedYes

External IDs

ORCID /0000-0002-7062-9598/work/174430526

Keywords

ASJC Scopus subject areas