Combined Modeling of Electromigration, Thermal and Stress Migration in AC Interconnect Lines
Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed › peer-review
Contributors
Abstract
The migration of atoms in metal interconnects in integrated circuits (ICs) increasingly endangers chip reliability. The susceptibility of DC interconnects to electromigration has been extensively studied. A few works on thermal migration and AC electromigration are also available. Yet, the combined effect of both on chip reliability has been neglected thus far. This paper provides both FEM and analytical models for atomic migration and steady-state stress profiles in AC interconnects considering electromigration, thermal and stress migration combined. For this we expand existing models by the impact of self-healing, temperature-dependent resistivity, and short wire length. We conclude by analyzing the impact of thermal migration on interconnect robustness and show that it cannot be neglected any longer in migration robustness verification.
Details
Original language | English |
---|---|
Title of host publication | ISPD '23: Proceedings of the 2023 International Symposium on Physical Design |
Pages | 107 - 114 |
Number of pages | 8 |
ISBN (electronic) | 9781450399784 |
Publication status | Published - 26 Mar 2023 |
Peer-reviewed | Yes |
External IDs
Scopus | 85151550118 |
---|
Keywords
ASJC Scopus subject areas
Keywords
- AC Interconnects, Electromigration, Physical Design, Reliability, Thermal Migration