The processing of semiconductors is very demanding from technological and material flow perspective. Due to the cost-intensive production environment, it is essential to ensure efficient supply of material to the production equipment. Therefore, the use of Automated Guided Vehicle (AGV) becomes increasingly important. They are used both as supplement to existing and as independent transport systems. The vehicle types available on the market differ in their characteristics and are often configured to customer specifications. As a result, it is useful to carry out a material flow simulation for the planning of AGV-based transport systems. In particular, the modeling of self-navigating AGVs, which orient themselves independently of given guidelines, poses new challenges.