Automation and Digitalization along the Supply Chain for Power Semiconductors from Wafer Supplier to Backend Manufacturer
Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed › peer-review
Contributors
Details
Original language | English |
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Title of host publication | 21th European Advanced Process Control and Manufacturing Conference (apc|m) ,Brügge (Belgien), 28.–30. März 2023 |
Pages | 1-3 |
Number of pages | 3 |
Publication status | Published - 2023 |
Peer-reviewed | Yes |