Atomic layer deposition and characterization of Bi1Se1 thin films

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Shiyang He - , Chair of Metallic Materials and Metal Physics, Leibniz Institute for Solid State and Materials Research Dresden, TUD Dresden University of Technology (Author)
  • Amin Bahrami - , Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • Xiang Zhang - , Zhengzhou University (Author)
  • Magdalena Ola Cichocka - , Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • Jun Yang - , Chair of Metallic Materials and Metal Physics, Leibniz Institute for Solid State and Materials Research Dresden, TUD Dresden University of Technology (Author)
  • Jaroslav Charvot - , University of Pardubice (Author)
  • Filip Bureš - , University of Pardubice (Author)
  • Alla Heckel - , University of Duisburg-Essen (Author)
  • Stephan Schulz - , University of Duisburg-Essen (Author)
  • Kornelius Nielsch - , Chair of Metallic Materials and Metal Physics, Leibniz Institute for Solid State and Materials Research Dresden, TUD Dresden University of Technology (Author)

Abstract

Van der Waals (vdWs) heterostructured materials have attracted considerable interest due to their intriguing physical properties. Here, we report on the deposition of BiSe by atomic layer deposition (ALD) using Bi(NMe2)3 and Se(SnMe3)2 as volatile and reactive Bi and Se precursors, respectively. The growth rate varies from 1.5 to 2.0 Å/cycle in the deposition temperature range of 90–120 °C. Higher deposition temperatures lead to increased grain sizes and enhanced crystallinity of resulting films. Further microstructure characterization reveals the formation of crystalline domains with varying orientations and nanotwinned boundaries. The presence of Bi-Bi zigzag bilayers and the formation of the BiSe phase were confirmed by the existence of the Bi-Bi binding energy peak in the XPS spectra and Raman spectra. Furthermore, the electrical conductivity of BiSe ranged from 1420 to 1520 S/cm due to the ultrahigh carrier concentration (2–3.5 × 1021 cm−3), which is the highest among undoped bismuth selenide-based materials.

Details

Original languageEnglish
Pages (from-to)4808-4813
Number of pages6
JournalJournal of the European Ceramic Society
Volume43
Issue number11
Publication statusPublished - Sept 2023
Peer-reviewedYes

Keywords

Keywords

  • Atomic layer deposition, BiSe, Carrier concentration, Van der Waals heterostructured materials