Conflict monitoring processes are central for cognitive control. Neurophysiological correlates of conflict monitoring (i.e. the N2 ERP) likely represent a mixture of different cognitive processes. Based on theoretical considerations, we hypothesized that effects of anodal tDCS (atDCS) in superior frontal areas affect specific subprocesses in neurophysiological activity during conflict monitoring. To investigate this, young healthy adults performed a Simon task while EEG was recorded. atDCS and sham tDCS were applied in a single-blind, cross-over study design. Using temporal signal decomposition in combination with source localization analyses, we demonstrated that atDCS effects on cognitive control are very specific: the detrimental effect of atDCS on response speed was largest in case of response conflicts. This however only showed in aspects of the decomposed N2 component, reflecting stimulus–response translation processes. In contrast to this, stimulus-related aspects of the N2 as well as purely response-related processes were not modulated by atDCS. EEG source localization analyses revealed that the effect was likely driven by activity modulations in the superior frontal areas, including the supplementary motor cortex (BA6), as well as middle frontal (BA9) and medial frontal areas (BA32). atDCS did not modulate effects of proprioceptive information on hand position, even though this aspect is known to be processed within the same brain areas. Physiological effects of atDCS likely modulate specific aspects of information processing during cognitive control.