A Review of the Automation of the Czochralski Crystal Growth Process

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

Abstract

On the occasion of the centennial of the invention of the Czochralski crystal growth process by the Polish scientist Jan Czochralski, a review of selected strategies for the automatic control of this process is given. This review provides a sketch of the fundamental challenges of controlling the Czochralski process and the basic concepts of feedback control. Both early and modern approaches to the control of the Czochralski process are described. The discussion focuses on questions related to feed-forward control, feedback control, and state estimation. The presented methods rely on simple mathematical process models in contrast to the finite element model-based approaches typically used in crystal growth process design and analysis. Such mathematical models motivate both the structure and parameters of the chosen controller. A comprehensive list of references to background literature on this topic completes this survey.

Details

Original languageEnglish
Pages (from-to)181-192
Number of pages11
JournalActa Physica Polonica A
Volume124
Issue number2
Publication statusPublished - 2013
Peer-reviewedYes

External IDs

Scopus 84881414667

Keywords