A novel reconfigurable RF switch based on ferroelectric hafnium oxide FeFET fabricated in 22 nm FDSOI technology
Research output: Contribution to book/Conference proceedings/Anthology/Report › Conference contribution › Contributed › peer-review
Contributors
Abstract
This paper presents a novel type of ferroelectric field effect transistor (FeFET)-based RF switch with multiple finger structure fabricated in 22 ~nm FDSOI technology. The ability to adjust the threshold voltage non-volatile allows for a novel switch concept. The FeFET can operate at V_GS=\mathbf0, which reduces the necessity of bias-Tee configurations in the signal path. It combines the advantages of passive and active RF switches with low loss and low distortion. The devices were implemented in the common-source configuration and demonstrate a large memory window exceeding 2 ~V, as well as exceptional performance at mmWave frequencies. We determined a transit frequency \left(f_T\right) and maximum oscillation frequency (f_MAX) of 135GHz and 139GHz, respectively for a device with 16 fingers, 20 ~nm gate length, and 1 \mu m gate width.
Details
| Original language | English |
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| Title of host publication | 2023 18th European Microwave Integrated Circuits Conference, EuMIC 2023 |
| Publisher | Institute of Electrical and Electronics Engineers (IEEE) |
| Pages | 181-184 |
| Number of pages | 4 |
| ISBN (electronic) | 9782874870736 |
| Publication status | Published - 2023 |
| Peer-reviewed | Yes |
Publication series
| Series | European Microwave Integrated Circuit Conference (EuMIC) |
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Conference
| Title | 18th European Microwave Integrated Circuits Conference |
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| Abbreviated title | EuMIC 2023 |
| Conference number | 18 |
| Duration | 18 - 19 September 2023 |
| Degree of recognition | International event |
| Location | Messe Berlin |
| City | Berlin |
| Country | Germany |
External IDs
| ORCID | /0000-0002-7062-9598/work/174430543 |
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Keywords
ASJC Scopus subject areas
Keywords
- FDSOI, FeFET, ferroelectric, HfO2, HVT, LVT, memory window