A new dimension for magnetosensitive e-skins: active matrix integrated micro-origami sensor arrays

Research output: Contribution to journalResearch articleContributedpeer-review

Contributors

  • Christian Becker - , Chemnitz University of Technology, Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • Bin Bao - , Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • Dmitriy D. Karnaushenko - , Chemnitz University of Technology, Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • Vineeth Kumar Bandari - , Chemnitz University of Technology (Author)
  • Boris Rivkin - , Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • Zhe Li - , Chemnitz University of Technology (Author)
  • Maryam Faghih - , Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • Daniil Karnaushenko - , Chemnitz University of Technology, Leibniz Institute for Solid State and Materials Research Dresden (Author)
  • Oliver G. Schmidt - , Chemnitz University of Technology, Leibniz Institute for Solid State and Materials Research Dresden, TUD Dresden University of Technology (Author)

Abstract

Magnetic sensors are widely used in our daily life for assessing the position and orientation of objects. Recently, the magnetic sensing modality has been introduced to electronic skins (e-skins), enabling remote perception of moving objects. However, the integration density of magnetic sensors is limited and the vector properties of the magnetic field cannot be fully explored since the sensors can only perceive field components in one or two dimensions. Here, we report an approach to fabricate high-density integrated active matrix magnetic sensor with three-dimensional (3D) magnetic vector field sensing capability. The 3D magnetic sensor is composed of an array of self-assembled micro-origami cubic architectures with biased anisotropic magnetoresistance (AMR) sensors manufactured in a wafer-scale process. Integrating the 3D magnetic sensors into an e-skin with embedded magnetic hairs enables real-time multidirectional tactile perception. We demonstrate a versatile approach for the fabrication of active matrix integrated 3D sensor arrays using micro-origami and pave the way for new electronic devices relying on the autonomous rearrangement of functional elements in space.

Details

Original languageEnglish
Article number2121
JournalNature communications
Volume13
Issue number1
Publication statusPublished - Dec 2022
Peer-reviewedYes

External IDs

PubMed 35440595