A Cost-Effective Flip-Chip Interconnection for Applications from DC until 200 GHz

Research output: Contribution to book/Conference proceedings/Anthology/ReportConference contributionContributedpeer-review

Contributors

Abstract

This paper presents design, fabrication, and characterization of a cost-effective flip-chip interconnection suitable for operation up to 200 GHz. The approach relies on gold balls produced with standard bonding tools, and welded on the pads of the interconnected chips by a thermo-compression process. Several simulation approaches have been used to optimize the interface, ranging from the stand-alone simulation of the gold balls up to the complete simulations of the test structures employed for the characterization of the proposed interface. The back-end-of-line of a commercially available 130 nm SiGe process was used to implement the test structures, and insertion-losses smaller than 0.5 dB at 100 GHz, and 1.5 dB at 200 GHz were demonstrated for the interface, in agreement with simulation results. The proposed approach reduces the insertion-loss by 1.5 dB at 150 GHz with respect to previous demonstrations making use of similar ground-signal-ground (GSG) pads interface, and fabrication procedure.

Details

Original languageEnglish
Title of host publicationIEEE Asia-Pacific Conference on Applied Electromagnetics (APACE)
Number of pages6
Publication statusPublished - Nov 2019
Peer-reviewedYes

Conference

TitleIEEE Asia-Pacific Conference on Applied Electromagnetics (APACE)
Abbreviated titleAPACE
Conference number
Duration25 - 27 November 2019
Location
CityMelacca
CountryMalaysia

External IDs

ORCID /0000-0003-1319-0870/work/141545126
Scopus 85082482377

Keywords

Research priority areas of TU Dresden