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Vacuum : surface engineering, surface instrumentation & vacuum technology

ISSNs: 0042-207X

Elsevier Science B.V.

Scopus rating (2023): CiteScore 6.8 SJR 0.705 SNIP 1.178

Journal

Titles	Vacuum : surface engineering, surface instrumentation & vacuum technology Vacuum
ISSNs	0042-207X
Publisher	Elsevier Science B.V.
Scopus ID	12489

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530 Physics

High growth rate magnetron sputter epitaxy of GaN using a solid Ga target

Pingen, K., Hinz, A. M., Sandström, P., Wolff, N., Kienle, L., Scipioni, L., Greer, J., & 4 othersvon Hauff, E., Hultman, L., Birch, J. & Hsiao, C. L., 2 Dec 2023, In: Vacuum. 220 (2024), 9 p., 112852.

Research output: Contribution to journal › Research article › Contributed › peer-review

Fast and reliable simulations of argon inductively coupled plasma using COMSOL

Brezmes, A. O. & Breitkopf, C., 2015, In: Vacuum : surface engineering, surface instrumentation & vacuum technology. 116, p. 65-72 8 p.

Research output: Contribution to journal › Research article › Contributed › peer-review

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Research Portal of the TU Dresden

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