Journal of vacuum science & technology : JVST ; B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena
ISSNs: 2166-2746, 1071-1023, 0734-211X
Additional searchable ISSN (electronic): 0734-211X, 1520-8567, 2166-2754
AIP Publishing , United States of America
Journal
| Titles |
|
|---|---|
| Additional searchable titles | Journal of Vacuum Science & Technology B, Journal of vacuum science & technology, the official journal of the AVS, Microelectronics processing and phenomena |
| ISSNs | 2166-2746, 1071-1023, 0734-211X |
| Additional searchable ISSN (electronic) | 0734-211X, 1520-8567, 2166-2754 |
| Publisher | AIP Publishing |
| Country/Territory | United States of America |
| ZDB-ID | 3117333-0 |
| ZDB-ID | 1475429-0 |
| ZDB-ID | 3117331-7 |