Wideband response of MEMS resonators beyond their natural frequency for structural health monitoring applications

Publikation: Beitrag in FachzeitschriftForschungsartikelBeigetragenBegutachtung

Beitragende

  • Talha Masood Khan - , University of Illinois at Chicago (Autor:in)
  • Ronghua Xu - , Professur für Massivbau (Autor:in)
  • Hrishikesh Danawe - , University of Michigan, Ann Arbor (Autor:in)
  • Steffen Marx - , Professur für Massivbau (Autor:in)
  • Serife Tol - , University of Michigan, Ann Arbor (Autor:in)
  • Didem Ozevin - , University of Illinois at Chicago (Autor:in)

Abstract

This study presents an experimental characterization of a multi-frequency MEMS acoustic emission (AE) sensor designed for broadband structural health monitoring (SHM) applications. This work demonstrates the capability of this sensor to operate effectively under off-resonance conditions at significantly lower frequencies. The sensor’s electromechanical response was quantified using a Laser Doppler Vibrometer (LDV) over a broad excitation range of 40–650 kHz. These LDV measurements revealed a consistent displacement response outside the resonance peaks, confirming mechanical sensitivity across the full spectrum. To evaluate its practical AE detection performance, controlled wire-break tests were conducted and benchmarked against a commercial broadband AE sensor. The MEMS sensor demonstrated comparable signal fidelity and broadband response in the frequency range below 100 kHz. These findings highlight the sensor’s viability for detecting low-frequency AE events that typically fall outside standard AE sensor resonance bands. The combined LDV and wire-break analysis establishes a comprehensive framework for validating MEMS AE sensor behavior both off-resonance and at resonance, supporting their integration into wideband AE monitoring systems.

Details

OriginalspracheEnglisch
Aufsatznummer41
FachzeitschriftJournal of Civil Structural Health Monitoring
Jahrgang16
Ausgabenummer3-4
PublikationsstatusVeröffentlicht - Sept. 2026
Peer-Review-StatusJa

Externe IDs

ORCID /0000-0001-8735-1345/work/223386021

Schlagworte

Schlagwörter

  • Acoustic emission sensor, LDV, MEMS, Off-resonance, Wire break detection