Wideband response of MEMS resonators beyond their natural frequency for structural health monitoring applications
Research output: Contribution to journal › Research article › Contributed › peer-review
Contributors
Abstract
This study presents an experimental characterization of a multi-frequency MEMS acoustic emission (AE) sensor designed for broadband structural health monitoring (SHM) applications. This work demonstrates the capability of this sensor to operate effectively under off-resonance conditions at significantly lower frequencies. The sensor’s electromechanical response was quantified using a Laser Doppler Vibrometer (LDV) over a broad excitation range of 40–650 kHz. These LDV measurements revealed a consistent displacement response outside the resonance peaks, confirming mechanical sensitivity across the full spectrum. To evaluate its practical AE detection performance, controlled wire-break tests were conducted and benchmarked against a commercial broadband AE sensor. The MEMS sensor demonstrated comparable signal fidelity and broadband response in the frequency range below 100 kHz. These findings highlight the sensor’s viability for detecting low-frequency AE events that typically fall outside standard AE sensor resonance bands. The combined LDV and wire-break analysis establishes a comprehensive framework for validating MEMS AE sensor behavior both off-resonance and at resonance, supporting their integration into wideband AE monitoring systems.
Details
| Original language | English |
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| Article number | 41 |
| Journal | Journal of Civil Structural Health Monitoring |
| Volume | 16 |
| Issue number | 3-4 |
| Publication status | Published - Sept 2026 |
| Peer-reviewed | Yes |
External IDs
| ORCID | /0000-0001-8735-1345/work/223386021 |
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Keywords
ASJC Scopus subject areas
Keywords
- Acoustic emission sensor, LDV, MEMS, Off-resonance, Wire break detection