Uniting the trinity of ferroelectric HfO2 memory devices in a single memory cell
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Beitragende
Abstract
The polarization reversal in ferroelectric HfO2 is adopted to store information in three distinct device classes-ferroelectric field effect transistors (FeFET), ferroelectric capacitors (FeCAP) and ferroelectric tunnel junctions (FTJ). Common to all three concepts is the adoption of a ferroelectric layer stack that acts either as gate dielectric in the FeFET or as the capacitor dielectric and tunneling barrier in the FeCAP or FTJ, respectively. A composite structure including an inevitably or purposefully formed dielectric layer is frequently adopted. In this work we report on the co-existence of all three memory concepts within one device structure and propose a 2T1C ferroelectric memory cell that allows the operation and comparative characterization of the trinity of ferroelectric memory devices.
Details
| Originalsprache | Englisch |
|---|---|
| Titel | 2019 IEEE 11th International Memory Workshop (IMW) |
| Erscheinungsort | Monterey |
| Herausgeber (Verlag) | Institute of Electrical and Electronics Engineers (IEEE) |
| Seiten | 20 - 23 |
| ISBN (elektronisch) | 978-1-7281-0981-7, 978-1-7281-0980-0 |
| ISBN (Print) | 978-1-7281-0982-4 |
| Publikationsstatus | Veröffentlicht - Mai 2019 |
| Peer-Review-Status | Ja |
Publikationsreihe
| Reihe | IEEE International Memory Workshop (IMW) |
|---|---|
| ISSN | 2330-7978 |
Workshop
| Titel | 11th IEEE International Memory Workshop |
|---|---|
| Kurztitel | IMW 2019 |
| Veranstaltungsnummer | 11 |
| Dauer | 12 - 15 Mai 2019 |
| Bekanntheitsgrad | Internationale Veranstaltung |
| Ort | Hyatt Hotel Monterey |
| Stadt | Montterey |
| Land | USA/Vereinigte Staaten |
Externe IDs
| ORCID | /0000-0003-3814-0378/work/142256267 |
|---|
Schlagworte
ASJC Scopus Sachgebiete
Schlagwörter
- FeFET, FeRAM, Ferroelectric Memory, FTJ