Uniting the trinity of ferroelectric HfO2 memory devices in a single memory cell

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragenBegutachtung

Beitragende

  • Stefan Slesazeck - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Viktor Havel - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Evelyn Breyer - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Halid Mulaosmanovic - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Michael Hoffmann - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Benjamin Max - , Institut für Halbleiter- und Mikrosystemtechnik (IHM) (Autor:in)
  • Stefan Duenkel - , Global Foundries, Inc. (Autor:in)
  • Thomas Mikolajick - , Professur für Nanoelektronik, NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)

Abstract

The polarization reversal in ferroelectric HfO2 is adopted to store information in three distinct device classes-ferroelectric field effect transistors (FeFET), ferroelectric capacitors (FeCAP) and ferroelectric tunnel junctions (FTJ). Common to all three concepts is the adoption of a ferroelectric layer stack that acts either as gate dielectric in the FeFET or as the capacitor dielectric and tunneling barrier in the FeCAP or FTJ, respectively. A composite structure including an inevitably or purposefully formed dielectric layer is frequently adopted. In this work we report on the co-existence of all three memory concepts within one device structure and propose a 2T1C ferroelectric memory cell that allows the operation and comparative characterization of the trinity of ferroelectric memory devices.

Details

OriginalspracheEnglisch
Titel2019 IEEE 11th International Memory Workshop (IMW)
ErscheinungsortMonterey
Herausgeber (Verlag)Institute of Electrical and Electronics Engineers (IEEE)
Seiten20 - 23
ISBN (elektronisch)978-1-7281-0981-7, 978-1-7281-0980-0
ISBN (Print)978-1-7281-0982-4
PublikationsstatusVeröffentlicht - Mai 2019
Peer-Review-StatusJa

Publikationsreihe

ReiheIEEE International Memory Workshop (IMW)
ISSN2330-7978

Workshop

Titel11th IEEE International Memory Workshop
KurztitelIMW 2019
Veranstaltungsnummer11
Dauer12 - 15 Mai 2019
BekanntheitsgradInternationale Veranstaltung
OrtHyatt Hotel Monterey
StadtMontterey
LandUSA/Vereinigte Staaten

Externe IDs

ORCID /0000-0003-3814-0378/work/142256267

Schlagworte

Schlagwörter

  • FeFET, FeRAM, Ferroelectric Memory, FTJ