Temperature‐Dependent Phase Transitions in Hf x Zr 1‐x O 2 Mixed Oxides: Indications of a Proper Ferroelectric Material
Publikation: Beitrag in Fachzeitschrift › Forschungsartikel › Beigetragen › Begutachtung
Beitragende
Abstract
Knowledge about phase transitions in doped HfO 2 and ZrO 2-based films is crucial for developing future ferroelectric devices. These devices should perform in ambient temperature ranges with no degradation of device performance. Here, the phase transition from the polar orthorhombic to the nonpolar tetragonal phase in thin films is of significant interest. Detailed electrical and structural characterization is performed on 10 nm mixed Hf xZr 1-xO 2 binary oxides with different ZrO 2 in HfO 2 and small changes in oxygen content. Both dopant and oxygen content directly impact the phase transition temperature between the polar and nonpolar phase. A first-order phase transition with thermal hysteresis is observed from the nonpolar to the polar phase with a maximum in the dielectric constant. The observed phase transition temperatures confirm trends as obtained by DFT calculations. Based on the outcome of the measurements, the classification of the ferroelectric material is discussed.
Details
| Originalsprache | Englisch |
|---|---|
| Aufsatznummer | 2200265 |
| Seitenumfang | 9 |
| Fachzeitschrift | Advanced electronic materials |
| Jahrgang | 8 |
| Ausgabenummer | 9 |
| Frühes Online-Datum | 17 Mai 2022 |
| Publikationsstatus | Veröffentlicht - Sept. 2022 |
| Peer-Review-Status | Ja |
Externe IDs
| Scopus | 85132249557 |
|---|---|
| Mendeley | cf254e7e-9562-39fc-b617-1b7fe718ee92 |
| WOS | 000796380100001 |
| unpaywall | 10.1002/aelm.202200265 |
Schlagworte
Forschungsprofillinien der TU Dresden
- Mikro- und Nanoelektronik - Curie–Weiss law, ferroelectric materials, hafnium oxide, phase transition in doped HfO 2 and ZrO 2, zirconium oxide
- Funktionale Materialien und Werkstoffe - Curie–Weiss law, ferroelectric materials, hafnium oxide, phase transition in doped HfO 2 and ZrO 2, zirconium oxide
DFG-Fachsystematik nach Fachkollegium
- Elektronische Halbleiter, Bauelemente und Schaltungen, Integrierte Systeme - Curie–Weiss law, ferroelectric materials, hafnium oxide, phase transition in doped HfO 2 and ZrO 2, zirconium oxide
ASJC Scopus Sachgebiete
- Elektronische, optische und magnetische Materialien - Curie–Weiss law, ferroelectric materials, hafnium oxide, phase transition in doped HfO 2 and ZrO 2, zirconium oxide
Schlagwörter
- Curie–Weiss law, ferroelectric materials, hafnium oxide, phase transition in doped HfO 2 and ZrO 2, zirconium oxide
Bibliotheksschlagworte
- 621 Angewandte Physik - Curie–Weiss law, ferroelectric materials, hafnium oxide, phase transition in doped HfO 2 and ZrO 2, zirconium oxide