Temperature‐Dependent Phase Transitions in Hf x Zr 1‐x O 2 Mixed Oxides: Indications of a Proper Ferroelectric Material

Publikation: Beitrag in FachzeitschriftForschungsartikelBeigetragenBegutachtung

Beitragende

  • Uwe Schroeder - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Terence Mittmann - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Monica Materano - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Patrick D. Lomenzo - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Patrick Edgington - , North Carolina State University (Autor:in)
  • Young H. Lee - , North Carolina State University (Autor:in)
  • Meshari Alotaibi - , University of Sheffield (Autor:in)
  • Anthony R. West - , University of Sheffield (Autor:in)
  • Thomas Mikolajick - , Professur für Nanoelektronik, NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Alfred Kersch - , Hochschule für angewandte Wissenschaften München (Autor:in)
  • Jacob L. Jones - , North Carolina State University (Autor:in)

Abstract

Knowledge about phase transitions in doped HfO 2 and ZrO 2-based films is crucial for developing future ferroelectric devices. These devices should perform in ambient temperature ranges with no degradation of device performance. Here, the phase transition from the polar orthorhombic to the nonpolar tetragonal phase in thin films is of significant interest. Detailed electrical and structural characterization is performed on 10 nm mixed Hf xZr 1-xO 2 binary oxides with different ZrO 2 in HfO 2 and small changes in oxygen content. Both dopant and oxygen content directly impact the phase transition temperature between the polar and nonpolar phase. A first-order phase transition with thermal hysteresis is observed from the nonpolar to the polar phase with a maximum in the dielectric constant. The observed phase transition temperatures confirm trends as obtained by DFT calculations. Based on the outcome of the measurements, the classification of the ferroelectric material is discussed.

Details

OriginalspracheEnglisch
Aufsatznummer2200265
Seitenumfang9
FachzeitschriftAdvanced electronic materials
Jahrgang8
Ausgabenummer9
Frühes Online-Datum17 Mai 2022
PublikationsstatusVeröffentlicht - Sept. 2022
Peer-Review-StatusJa

Externe IDs

Scopus 85132249557
Mendeley cf254e7e-9562-39fc-b617-1b7fe718ee92
WOS 000796380100001
unpaywall 10.1002/aelm.202200265

Schlagworte

Schlagwörter

  • Curie–Weiss law, ferroelectric materials, hafnium oxide, phase transition in doped HfO 2 and ZrO 2, zirconium oxide

Bibliotheksschlagworte