Surface Wetting and Structure Morphologies in Superfine Inkjet Printing of Platinum Electrodes for Surface Acoustic Wave Applications
Publikation: Hochschulschrift/Abschlussarbeit › Bachelorarbeit
Beitragende
Abstract
Printed electronics pose a recent circuit manufacturing alternative to the traditional pho-\ntolithography and lift-off processes. Superfine Inkjet (SIJ) is one subtype of inkjet printing\nwhich allows the rapid, material saving and direct patterning of electrodes on many differ-\nent surfaces. It shows great potential in the additive manufacturing of surface acoustic wave\nsensors where a micrometer resolution is required. This work is the first to report the direct\npatterning of micrometer sized Platinum electrodes for surface acoustic wave sensor applica-\ntions on silicon and lithium niobate substrates. The commercial UDPtEJD Platinum ink was\nfound to have static contact angles of typically 3 ∘ – 5 ∘ . When printing lines, the ink quickly\ndewetted the surfaces and formed droplets on all materials but substrates coated with 20 nm\nChromium. An emerging coffee ring effect on the Chromium layer was diminished by carefully\nhandling the ink under inert Argon gas, imposing initial printing pauses and using low printing\nvoltages. Continuous lines exhibiting widths of 0.6–1.5 μm were thus successfully patterned\non lithium niobate and silicon wafers. The lowest measured electrical DC resistivity of printed\nand heated Platinum lines was (420 ± 30) μOhm · cm, about 40 times higher than the value for\nbulk Platinum. Finally, a complete interdigital transducer with 2 μm wide Platinum electrodes\nwas fully SIJ printed on lithium niobate.
Details
| Originalsprache | Englisch |
|---|---|
| Qualifizierungsstufe | Bachelor of Science |
| Gradverleihende Hochschule | |
| Betreuer:in / Berater:in |
|
| Publikationsstatus | Veröffentlicht - 2017 |
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Schlagworte
Schlagwörter
- LiNbO3, surface acoustic waves