Quantum-sized silicon precipitates in silicon-implanted and pulse-annealed silicon dioxide films: Photoluminescence and structural transformations

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragenBegutachtung

Beitragende

  • IE Tyschenko - (Autor:in)
  • GA Kachurin - (Autor:in)
  • KS Zhuravlev - (Autor:in)
  • NA Pazdnikov - (Autor:in)
  • VA Volodin - (Autor:in)
  • AK Gutakovsky - (Autor:in)
  • AF Leier - (Autor:in)
  • H Frob - , Professur für Optoelektronik (Autor:in)
  • K Leo - , Professur für Optoelektronik (Autor:in)
  • T Bohme - (Autor:in)
  • L Rebohle - (Autor:in)
  • RA Yankov - (Autor:in)
  • W Skorupa - (Autor:in)

Abstract

Strong blue, red and near-infrared photoluminescence has been observed from Si+-implanted and pulse-annealed SiO2 layers. Raman scattering and high-resolution electron microscopy analyses have revealed a correlation between the structure of the Si inclusions in the SiO2 matrix and the photoluminescence. Structural transformations in the Si-rich SiO2 layers during pulse and furnace annealing have been discussed in terms of the changes in the light emission observed experimentally. Small Si clusters, non-crystalline inclusions and nanocrystals are believed to be the light sources. The blue, red and near-infrared photoluminescence is associated with small complexes of excess Si atoms, non-crystalline Si nanoinclusions and quantum-confined Si nanocrystals, respectively.

Details

OriginalspracheDeutsch
TitelSymposium on Materials Modification and Synthesis by Ion Beam Processing, at the 1996 MRS Fall Meeting
Seiten453-458
Seitenumfang6
Band438
PublikationsstatusVeröffentlicht - 1997
Peer-Review-StatusJa

Publikationsreihe

ReiheMRS online proceedings library
ISSN0272-9172

Schlagworte