Photonic curing of sol-gel derived HfO2 dielectrics for organic field-effect transistors
Publikation: Beitrag in Fachzeitschrift › Forschungsartikel › Beigetragen › Begutachtung
Beitragende
Abstract
An efficient way to reduce the supply voltages of organic field-effect transistors is the use of high-k inorganic materials. In order to allow high throughput during fabrication, solution-based processes for realizing inorganic dielectrics by using sol-gel procedures have become attractive in recent years. However, this procedure typically involves extended high-temperature annealing steps to achieve high-quality insulating layers which hampers fast fabrication and is incompatible to be carried out on low-temperature organic substrates. In this work, the use of a photonic curing technique is presented for the annealing of sol-gel derived hafnium oxide (HfO2) dielectrics within a few seconds. The investigations demonstrate the reduction of the leakage current density of more than 3 orders of magnitude after the photonic curing process reaching only slightly higher values as obtained with dielectric films formed from highly sophisticated atomic layer deposition. Moreover, capacitance measurements reveal a dielectric constant of 26 indicating bulk-like properties. Furthermore, organic transistors based on photonically cured HfO2 sol-gel dielectrics are fabricated and characterized operating at low voltages (<2 V), low subthreshold swing (110 mV/decade) and charge carrier mobilities of 1 cm2/Vs using a semiconducting liquid-crystal polymer.
Details
Originalsprache | Englisch |
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Seiten (von - bis) | 15753-15761 |
Seitenumfang | 9 |
Fachzeitschrift | Ceramics international |
Jahrgang | 40 |
Ausgabenummer | 10 |
Publikationsstatus | Veröffentlicht - 1 Dez. 2014 |
Peer-Review-Status | Ja |
Externe IDs
ORCID | /0000-0002-0757-3325/work/139064934 |
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WOS | 000343353600046 |
Schlagworte
ASJC Scopus Sachgebiete
Schlagwörter
- Inorganic dielectrics, Organic field-effect transistors, Photonic curing, Sol-gel, Solution-based processes