Optimization of 4H-SiC photodiodes as selective UV sensors

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragenBegutachtung

Beitragende

  • Christian D. Matthus - , Professur für Schaltungstechnik und Netzwerktheorie, Friedrich-Alexander-Universität Erlangen-Nürnberg (Autor:in)
  • Alex Burenkov - , Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (Autor:in)
  • Tobias Erlbacher - , Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (Autor:in)

Abstract

The spectral responsivity of 4H-SiC photodiodes was studied and optimized in this paper with the aim to realize UV photo-sensors, selectively sensitive either to harder or to softer UV radiation. The spectral selectivity of the SiC-photodiodes was achieved by optimizing doping profiles in the active regions of the photodiodes and of the anti-reflective coating. A shallow doping profile of the p+-emitter allowed an enhancement of sensitivity for hard UV radiation. Deeper doping profiles were chosen for detection of softer UV radiation. The impact of the variations of the thickness of protective and anti-reflective layers was studied as well.

Details

OriginalspracheDeutsch
Titel2016 European Conference on Silicon Carbide & Related Materials (ECSCRM)
Herausgeber (Verlag)IEEE
Seiten1-1
Seitenumfang1
ISBN (Print)978-1-5090-2614-2
PublikationsstatusVeröffentlicht - 29 Sept. 2016
Peer-Review-StatusJa

Konferenz

Titel2016 European Conference on Silicon Carbide & Related Materials (ECSCRM)
Dauer25 - 29 September 2016
OrtHalkidiki, Greece

Externe IDs

Scopus 85019986337

Schlagworte

Schlagwörter

  • Photodiodes, Numerical models, Optimization, Numerical simulation, Doping profiles, Sensor systems