Optical Properties of Ferroelectric Films HfxZryO2 and La:HfxZryO2 according to Ellipsometry Data
Publikation: Beitrag in Fachzeitschrift › Forschungsartikel › Beigetragen › Begutachtung
Beitragende
Abstract
Abstract: Recently ferroelectric properties have been found in hafnia-based nanosized films. Such films are of the utmost interest for development of a universal memory, which combines the advantages of random access memory and flash memory. The paper studies optical properties of hafnia-zirconium oxide films H-fxZryO2 and lanthanum-alloyed hafnia-zirconium oxide films La:HfxZryO2. Fluctuations of thickness in HfxZryO2 do not exceed 3.5%, fluctuations of thickness in La:HfxZryO2 films—3.2%. Optical properties are analyzed based on effective-medium theory. According to effective-medium theory data, HfxZryO2 films contain 46% HfO2, 54% ZrO2, La:HfxZryO2 films contain 47.5% HfO2, 52.4% ZrO2, 2.5% La2O3.
Details
Originalsprache | Englisch |
---|---|
Seiten (von - bis) | 550-553 |
Seitenumfang | 4 |
Fachzeitschrift | Optics and Spectroscopy |
Jahrgang | 131 |
Ausgabenummer | 7 |
Publikationsstatus | Veröffentlicht - Juli 2023 |
Peer-Review-Status | Ja |
Externe IDs
ORCID | /0000-0003-3814-0378/work/163295401 |
---|
Schlagworte
ASJC Scopus Sachgebiete
Schlagwörter
- effective-medium theory, ferroelectric, refraction index, spectral ellipsometry