Influence of Biaxial Strain and Interfacial Layer Growth on Ferroelectric Wake-Up and Phase Transition Fields in ZrO2

Publikation: Beitrag in FachzeitschriftForschungsartikelBeigetragenBegutachtung

Beitragende

  • Bohan Xu - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Richard Ganser - , Hochschule für angewandte Wissenschaften München (Autor:in)
  • Kristina M. Holsgrove - , Queen's University Belfast (Autor:in)
  • Xuetao Wang - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Pramoda Vishnumurthy - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Thomas Mikolajick - , Professur für Nanoelektronik, NaMLab - Nanoelectronic materials laboratory gGmbH, Technische Universität Dresden (Autor:in)
  • Uwe Schroeder - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Alfred Kersch - , Hochschule für angewandte Wissenschaften München (Autor:in)
  • Patrick D. Lomenzo - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)

Abstract

Investigations on fluorite-structured ferroelectric HfO2/ZrO2 thin films are aiming to achieve high-performance films required for memory and computing technologies. These films exhibit excellent scalability and compatibility with the complementary metal-oxide semiconductor process used by semiconductor foundries, but stabilizing ferroelectric properties with a low operation voltage in the as-fabricated state of these films is a critical component for technology advancement. After removing the influence of interfacial layers, a linear correlation is observed between the biaxial strain and the electric field for transforming the nonferroelectric tetragonal to the ferroelectric orthorhombic phase in ZrO2 thin films. This observation is supported by applying the principle of energy conservation in combination with ab initio and molecular dynamics simulations. According to the simulations, a rarely reported Pnm21 orthorhombic phase may be stabilized by tuning biaxial strain in the ZrO2 films.

Details

OriginalspracheEnglisch
Seiten (von - bis)32533-32542
Seitenumfang10
FachzeitschriftACS Applied Materials and Interfaces
Jahrgang16
Ausgabenummer25
PublikationsstatusVeröffentlicht - 26 Juni 2024
Peer-Review-StatusJa

Externe IDs

PubMed 38873965
ORCID /0000-0003-3814-0378/work/163295409

Schlagworte

Ziele für nachhaltige Entwicklung

ASJC Scopus Sachgebiete

Schlagwörter

  • ferroelectricity, interface, phase transition, strain and stress, thin film, zirconium oxide