Influence of Biaxial Strain and Interfacial Layer Growth on Ferroelectric Wake-Up and Phase Transition Fields in ZrO2
Publikation: Beitrag in Fachzeitschrift › Forschungsartikel › Beigetragen › Begutachtung
Beitragende
Abstract
Investigations on fluorite-structured ferroelectric HfO2/ZrO2 thin films are aiming to achieve high-performance films required for memory and computing technologies. These films exhibit excellent scalability and compatibility with the complementary metal-oxide semiconductor process used by semiconductor foundries, but stabilizing ferroelectric properties with a low operation voltage in the as-fabricated state of these films is a critical component for technology advancement. After removing the influence of interfacial layers, a linear correlation is observed between the biaxial strain and the electric field for transforming the nonferroelectric tetragonal to the ferroelectric orthorhombic phase in ZrO2 thin films. This observation is supported by applying the principle of energy conservation in combination with ab initio and molecular dynamics simulations. According to the simulations, a rarely reported Pnm21 orthorhombic phase may be stabilized by tuning biaxial strain in the ZrO2 films.
Details
Originalsprache | Englisch |
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Seiten (von - bis) | 32533-32542 |
Seitenumfang | 10 |
Fachzeitschrift | ACS Applied Materials and Interfaces |
Jahrgang | 16 |
Ausgabenummer | 25 |
Publikationsstatus | Veröffentlicht - 26 Juni 2024 |
Peer-Review-Status | Ja |
Externe IDs
PubMed | 38873965 |
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ORCID | /0000-0003-3814-0378/work/163295409 |
Schlagworte
Ziele für nachhaltige Entwicklung
ASJC Scopus Sachgebiete
Schlagwörter
- ferroelectricity, interface, phase transition, strain and stress, thin film, zirconium oxide