From Doping to Polarity Control: Transport Switching in Silicon Nanowire Field-Effect Transistors

Publikation: Beitrag in Fachzeitschrift › Forschungsartikel › Beigetragen › Begutachtung

Beitragende

Abstract

As semiconductor technologies approach the subnanometer node, conventional CMOS scaling faces fundamental physical limitations. To overcome these challenges, novel device architectures are being investigated to sustain performance improvements and enable enhanced functionality. This work explores silicon nanowire field-effect transistors (FETs) fabricated using a top-down, CMOS-compatible process, employing n-type phosphorus-doped channels with systematically varied doping concentrations. The influence of doping on carrier transport is investigated through back-gate, top-gate, and dual-gate configurations. Lightly doped devices exhibit transport dominated by Schottky-barrier modulation, enabling ambipolar and unipolar operation, polarity control, and tunable transfer characteristics with on/off current ratios up to 108 and excellent p–n on-current symmetry of 1.67, emulating reconfigurable modes of operation. In contrast, increasing the doping concentration and reducing the channel length promote a transition toward junctionless operation. Highly doped short-channel devices with gate lengths down to 500 nm and cross-sectional dimensions of 20 nm exhibit unipolar operation, strong electrostatic control, and scalable junctionless behavior. These devices achieve on/off current ratios exceeding 106, stable threshold voltages below 1 V, and moderate subthreshold swing. This work provides insight into the evolution of transport mechanisms from Schottky-barrier-controlled to junctionless operation, demonstrating doping-dependent switching of functionality within a CMOS-compatible platform.

Details

OriginalspracheEnglisch
Aufsatznummere70442
FachzeitschriftPhysica Status Solidi (A) Applications and Materials Science
Jahrgang223
Ausgabenummer15
PublikationsstatusVeröffentlicht - 5 Aug. 2026
Peer-Review-StatusJa

Schlagworte

ASJC Scopus Sachgebiete

  • Elektronische, optische und magnetische Materialien - ambipolarity, electrostatic modulation, field-effect transistor (FET), flash lamp annealing, ion implantation, junctionless transistor, polarity-control, Schottky-barrier, silicon nanowire, unipolarity
  • Physik der kondensierten Materie - ambipolarity, electrostatic modulation, field-effect transistor (FET), flash lamp annealing, ion implantation, junctionless transistor, polarity-control, Schottky-barrier, silicon nanowire, unipolarity
  • Oberflächen und Grenzflächen - ambipolarity, electrostatic modulation, field-effect transistor (FET), flash lamp annealing, ion implantation, junctionless transistor, polarity-control, Schottky-barrier, silicon nanowire, unipolarity
  • Oberflächen, Beschichtungen und Folien - ambipolarity, electrostatic modulation, field-effect transistor (FET), flash lamp annealing, ion implantation, junctionless transistor, polarity-control, Schottky-barrier, silicon nanowire, unipolarity
  • Elektrotechnik und Elektronik - ambipolarity, electrostatic modulation, field-effect transistor (FET), flash lamp annealing, ion implantation, junctionless transistor, polarity-control, Schottky-barrier, silicon nanowire, unipolarity
  • Werkstoffchemie - ambipolarity, electrostatic modulation, field-effect transistor (FET), flash lamp annealing, ion implantation, junctionless transistor, polarity-control, Schottky-barrier, silicon nanowire, unipolarity

Schlagwörter

  • ambipolarity, electrostatic modulation, field-effect transistor (FET), flash lamp annealing, ion implantation, junctionless transistor, polarity-control, Schottky-barrier, silicon nanowire, unipolarity