Dislocation-Free SiGe/Si Heterostructures

Publikation: Beitrag in FachzeitschriftÜbersichtsartikel (Review)BeigetragenBegutachtung

Beitragende

  • Francesco Montalenti - , Università degli Studi di Milano Bicocca (Autor:in)
  • Fabrizio Rovaris - , Università degli Studi di Milano Bicocca (Autor:in)
  • Roberto Bergamaschini - , Università degli Studi di Milano Bicocca (Autor:in)
  • Leo Miglio - , Università degli Studi di Milano Bicocca (Autor:in)
  • Marco Salvalaglio - , Technische Universität Dresden (Autor:in)
  • Giovanni Isella - , Polytechnic University of Milan (Autor:in)
  • Fabio Isa - , Commonwealth Scientific & Industrial Research Organisation (CSIRO) (Autor:in)
  • Hans von Kanel - , Swiss Federal Laboratories for Materials Science and Technology (Empa) (Autor:in)

Abstract

Ge vertical heterostructures grown on deeply-patterned Si(001) were first obtained in 2012 (C.V. Falub et al., Science2012, 335, 1330-1334), immediately capturing attention due to the appealing possibility of growing micron-sized Ge crystals largely free of thermal stress and hosting dislocations only in a small fraction of their volume. Since then, considerable progress has been made in terms of extending the technique to several other systems, and of developing further strategies to lower the dislocation density. In this review, we shall mainly focus on the latter aspect, discussing in detail 100% dislocation-free, micron-sized vertical heterostructures obtained by exploiting compositional grading in the epitaxial crystals. Furthermore, we shall also analyze the role played by the shape of the pre-patterned substrate in directly influencing the dislocation distribution.

Details

OriginalspracheEnglisch
Aufsatznummer257
Seitenumfang16
FachzeitschriftCrystals
Jahrgang8
Ausgabenummer6
PublikationsstatusVeröffentlicht - Juni 2018
Peer-Review-StatusJa
Extern publiziertJa

Externe IDs

Scopus 85049241068
ORCID /0000-0002-4217-0951/work/142237414

Schlagworte

Schlagwörter

  • heteroepitaxy, defects, semiconductors, elasticity, plasma-enhanced chemical vapour deposition, AXIAL HETEROSTRUCTURES, GE, SI, LAYERS, NANODIFFRACTION, NANOSTRUCTURES, RELAXATION, DEPOSITION, REDUCTION, DENSITIES