Demonstration of a p-Type Ferroelectric FET With Immediate Read-After-Write Capability

Publikation: Beitrag in FachzeitschriftForschungsartikelBeigetragenBegutachtung

Beitragende

  • Dominik Kleimaier - (Autor:in)
  • Halid Mulaosmanovic - (Autor:in)
  • Stefan Dunkel - (Autor:in)
  • Sven Beyer - (Autor:in)
  • Steven Soss - (Autor:in)
  • Stefan Slesazeck - (Autor:in)
  • Thomas Mikolajick - , Professur für Nanoelektronik, NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)

Abstract

In this letter, p-type ferroelectric field-effect-transistors (FeFETs) based on HfO2 and embedded in GlobalFoundries 28 nm bulk high- ${k}$ metal gate (HKMG) technology (28SLPe) are systematically investigated and compared to their n-type counterparts. We show that the two device types, based on Si channel, exhibit a symmetric memory window (MW) and very similar switching behavior, yet profoundly different trapping kinetics. In contrast to n-FeFETs, p-FeFETs display a full MW immediately after the write operation and apparently no parasitic electron trapping. Based on this, we demonstrate an immediate read-after-write operation. Finally, we illustrate how slight structural changes of the gate stack, such as the introduction of the SiGe channel material, can enhance charge trapping and nullify the above-mentioned advantages.

Details

OriginalspracheEnglisch
Seiten (von - bis)1774-1777
Seitenumfang4
FachzeitschriftIEEE electron device letters
Jahrgang42
Ausgabenummer12
PublikationsstatusVeröffentlicht - Dez. 2021
Peer-Review-StatusJa

Externe IDs

Scopus 85119597021
Mendeley 07c84130-7b55-3bec-9eba-9e2ddfbc3ed3

Schlagworte

Bibliotheksschlagworte