Demonstration of a p-Type Ferroelectric FET With Immediate Read-After-Write Capability
Publikation: Beitrag in Fachzeitschrift › Forschungsartikel › Beigetragen › Begutachtung
Beitragende
Abstract
In this letter, p-type ferroelectric field-effect-transistors (FeFETs) based on HfO2 and embedded in GlobalFoundries 28 nm bulk high- ${k}$ metal gate (HKMG) technology (28SLPe) are systematically investigated and compared to their n-type counterparts. We show that the two device types, based on Si channel, exhibit a symmetric memory window (MW) and very similar switching behavior, yet profoundly different trapping kinetics. In contrast to n-FeFETs, p-FeFETs display a full MW immediately after the write operation and apparently no parasitic electron trapping. Based on this, we demonstrate an immediate read-after-write operation. Finally, we illustrate how slight structural changes of the gate stack, such as the introduction of the SiGe channel material, can enhance charge trapping and nullify the above-mentioned advantages.
Details
Originalsprache | Englisch |
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Seiten (von - bis) | 1774-1777 |
Seitenumfang | 4 |
Fachzeitschrift | IEEE electron device letters |
Jahrgang | 42 |
Ausgabenummer | 12 |
Publikationsstatus | Veröffentlicht - Dez. 2021 |
Peer-Review-Status | Ja |
Externe IDs
Scopus | 85119597021 |
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Mendeley | 07c84130-7b55-3bec-9eba-9e2ddfbc3ed3 |