Channel length dependent sensor response of Schottky-barrier FET pH sensors

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragenBegutachtung

Beitragende

Abstract

We present a multi channel Schottky-barrier (SB) field effect transistor (FET) based platform for chemical sensor applications and investigate its sensitivity on channel length. Designed transistors consist of parallel assembled bottom up grown silicon nanowires with a mean diameter of 20 nm. Focusing on investigations of devices with different channel lengths, we demonstrate that different optimum sensing regimes exist and they are determined by the device geometry. These target at different realizations and operation schemes. The sensitivities of the SB-FETs in linear and subthreshold regime are extracted from analysis of the pH response of silicon nanowire sensor devices.

Details

OriginalspracheEnglisch
TitelSENSORS, 2013 IEEE
Herausgeber (Verlag)IEEE Xplore
ISBN (elektronisch)978-1-4673-4642-9
PublikationsstatusVeröffentlicht - 2013
Peer-Review-StatusJa

Publikationsreihe

ReiheIEEE SENSORS
ISSN1930-0395

Konferenz

Titel12th IEEE SENSORS 2013 Conference
Dauer4 - 6 November 2013
StadtBaltimore, MD
LandUSA/Vereinigte Staaten

Externe IDs

ORCID /0000-0003-3814-0378/work/142256349

Schlagworte

ASJC Scopus Sachgebiete