Application and benefits of target programming algorithms for ferroelectric HfO2transistors

Publikation: Beitrag zu KonferenzenPaperBeigetragenBegutachtung

Beitragende

  • H. Zhou - , Ferroelectric Memory Company (Autor:in)
  • J. Ocker - , Ferroelectric Memory Company (Autor:in)
  • A. Padovani - , Applied Materials Inc. (Autor:in)
  • M. Pesic - , Applied Materials Inc. (Autor:in)
  • M. Trentzsch - , Global Foundries, Inc. (Autor:in)
  • S. Dunkel - , Global Foundries, Inc. (Autor:in)
  • H. Mulaosmanovic - , Technische Universität Dresden (Autor:in)
  • Stefan Slesazeck - , Technische Universität Dresden (Autor:in)
  • Luca Larcher - , Applied Materials Inc. (Autor:in)
  • S. Beyer - , Global Foundries, Inc. (Autor:in)
  • S. Muller - , Ferroelectric Memory Company (Autor:in)
  • T. Mikolajick - , Professur für Nanoelektronik, Technische Universität Dresden (Autor:in)

Abstract

The ferroelectric HfO2 based field effect transistor (FeFET) has been under research for many years and shows unique properties for applications in the field of emerging memories and in-memory computing. This work for the first time demonstrates how a target programming algorithm can improve the FeFET device characteristics with respect to endurance performance and variability for small device geometries. With this technique the threshold voltage Vt of the memory cell can be targeted to any desired value, which is essential for multilevel cells and analog in-memory computing as used in AI accelerators. The switching, trapping and detrapping characteristics of the cell and their influence on the target programming algorithm are presented. The trapping and leakage characteristics are modelled using the GinestraTM simulation software to extract the trap distribution in ferroelectric HfO2. Finally, a model for the underlying mechanism of the endurance degradation is proposed.

Details

OriginalspracheEnglisch
Seiten18.6.1-18.6.4
PublikationsstatusVeröffentlicht - 12 Dez. 2020
Peer-Review-StatusJa

Konferenz

Titel2020 Annual IEEE International Electron Devices Meeting
UntertitelInnovative Devices for a Better Future
KurztitelIEDM 2020
Veranstaltungsnummer66
Dauer12 - 18 Dezember 2020
OrtOnline
StadtSan Francisco
LandUSA/Vereinigte Staaten

Externe IDs

ORCID /0000-0003-3814-0378/work/142256188