Analysis of polymeric singlemode waveguides for inter-system communication

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragenBegutachtung

Abstract

This paper describes simulation, technology- and process development for the manufacturing of single mode polymeric waveguides by photolithography. Simulations for single mode operation in O- and C-band are carried out. Waveguides are directly patterned with UV-photolithography using Ormocere®material. Fiber to waveguide coupling and near field are characterized.

Details

OriginalspracheEnglisch
Titel2021 23rd European Microelectronics and Packaging Conference and Exhibition, EMPC 2021
Herausgeber (Verlag)Institute of Electrical and Electronics Engineers (IEEE)
Seitenumfang7
ISBN (elektronisch)978-0-9568086-7-7
PublikationsstatusVeröffentlicht - 2021
Peer-Review-StatusJa

Publikationsreihe

ReiheEuropean Microelectronics and Packaging Conference, EMPC

Konferenz

Titel23rd European Microelectronics and Packaging Conference & Exhibition
KurztitelEMPC 2021
Veranstaltungsnummer23
Dauer13 - 16 September 2021
Webseite
OrtOnline
StadtGothenburg
LandSchweden

Externe IDs

ORCID /0000-0002-0757-3325/work/139064768

Schlagworte

Schlagwörter

  • Direct patterning, Optical interconnects, Ormocere®, Polymeric waveguides, Single mode, UV-photolithography