A simple lithography-free approach for the fabrication of top-contact OFETs with sub-micrometer channel length
Publikation: Beitrag in Fachzeitschrift › Forschungsartikel › Beigetragen › Begutachtung
Beitragende
Abstract
Here, we show the fabrication of sub-micrometer channel devices that are patterned by a simple inclined thermal evaporation approach. This structuring methodology with the capability to produce electrodes with distances even below 100 nm is compatible with solution-based fabrication methods commonly applied to deposit high-mobility organic semiconductor films or even high-capacitance polymer gate dielectrics. As the contacts are directly defined through thermal evaporation without the need for any expensive masks or lithography techniques, it offers the possibility of simple, lab-scale assessment of promising material combinations in the development of high-performance organic transistors through direct access to sub-micrometer channel device characteristics. Here, we focus on the structuring method, show example devices with sub-micrometer channel lengths, and discuss the potential applications of this methodology as a lab-scale test vehicle for OFET development.
Details
| Originalsprache | Englisch |
|---|---|
| Aufsatznummer | 106819 |
| Seitenumfang | 7 |
| Fachzeitschrift | Organic electronics |
| Jahrgang | 119 |
| Publikationsstatus | Veröffentlicht - Aug. 2023 |
| Peer-Review-Status | Ja |
Externe IDs
| unpaywall | 10.1016/j.orgel.2023.106819 |
|---|---|
| WOS | 000985250800001 |
| ORCID | /0000-0002-8487-0972/work/142247550 |
Schlagworte
Forschungsprofillinien der TU Dresden
- Mikro- und Nanoelektronik - Angled evaporation, Contact patterning, Lithography-free, OFET, Short-channel transistor, Ofet
- Funktionale Materialien und Werkstoffe - Angled evaporation, Contact patterning, Lithography-free, OFET, Short-channel transistor, Ofet
DFG-Fachsystematik nach Fachkollegium
- Elektronische Halbleiter, Bauelemente und Schaltungen, Integrierte Systeme - Angled evaporation, Contact patterning, Lithography-free, OFET, Short-channel transistor, Ofet
- Herstellung und Eigenschaften von Funktionsmaterialien - Angled evaporation, Contact patterning, Lithography-free, OFET, Short-channel transistor, Ofet
- Experimentelle Physik der kondensierten Materie - Angled evaporation, Contact patterning, Lithography-free, OFET, Short-channel transistor, Ofet
Fächergruppen, Lehr- und Forschungsbereiche, Fachgebiete nach Destatis
- Mikro- und Nanoelektronik - Angled evaporation, Contact patterning, Lithography-free, OFET, Short-channel transistor, Ofet
- Materialphysik - Angled evaporation, Contact patterning, Lithography-free, OFET, Short-channel transistor, Ofet
ASJC Scopus Sachgebiete
- Elektronische, optische und magnetische Materialien - Angled evaporation, Contact patterning, Lithography-free, OFET, Short-channel transistor, Ofet
- Physik der kondensierten Materie - Angled evaporation, Contact patterning, Lithography-free, OFET, Short-channel transistor, Ofet
- Werkstoffchemie - Angled evaporation, Contact patterning, Lithography-free, OFET, Short-channel transistor, Ofet
- Allgemeine Chemie - Angled evaporation, Contact patterning, Lithography-free, OFET, Short-channel transistor, Ofet
- Elektrotechnik und Elektronik - Angled evaporation, Contact patterning, Lithography-free, OFET, Short-channel transistor, Ofet
- Biomaterialien - Angled evaporation, Contact patterning, Lithography-free, OFET, Short-channel transistor, Ofet
Schlagwörter
- Angled evaporation, Contact patterning, Lithography-free, OFET, Short-channel transistor, Ofet
Bibliotheksschlagworte
- 670 Industrielle Fertigung - Angled evaporation, Contact patterning, Lithography-free, OFET, Short-channel transistor, Ofet