A carbene stabilized precursor for the spatial atomic layer deposition of copper thin films

Publikation: Beitrag in FachzeitschriftForschungsartikelBeigetragenBegutachtung

Beitragende

  • Nils Boysen - , Ruhr-Universität Bochum (Autor:in)
  • Bujamin Misimi - , Bergische Univertsität Wuppertal (Autor:in)
  • Arbresha Muriqi - , University College Cork (Autor:in)
  • Jan Lucas Wree - , Ruhr-Universität Bochum (Autor:in)
  • Tim Hasselmann - , Bergische Univertsität Wuppertal (Autor:in)
  • Detlef Rogalla - , Ruhr-Universität Bochum (Autor:in)
  • Tobias Haeger - , Bergische Univertsität Wuppertal (Autor:in)
  • Detlef Theirich - , Bergische Univertsität Wuppertal (Autor:in)
  • Michael Nolan - , University College Cork, Ulster University (Autor:in)
  • Thomas Riedl - , Bergische Univertsität Wuppertal (Autor:in)
  • Anjana Devi - , Ruhr-Universität Bochum (Autor:in)

Abstract

This paper demonstrates a carbene stabilized precursor [Cu(tBuNHC)(hmds)] with suitable volatility, reactivity and thermal stability, that enables the spatial plasma-enhanced atomic layer deposition (APP-ALD) of copper thin films at atmospheric pressure. The resulting conductive and pure copper layers were thoroughly analysed and a comparison of precursor and process with the previously reported silver analogue [Ag(tBuNHC)(hmds)] revealed interesting similarities and notable differences in precursor chemistry and growth characteristics. This first report of APP-ALD grown copper layers is an important starting point for high throughput, low-cost manufacturing of copper films for nano- and optoelectronic devices.

Details

OriginalspracheEnglisch
Seiten (von - bis)13752-13755
Seitenumfang4
FachzeitschriftChemical communications
Jahrgang56
Ausgabenummer89
PublikationsstatusVeröffentlicht - 18 Nov. 2020
Peer-Review-StatusJa
Extern publiziertJa

Externe IDs

PubMed 33063069