A carbene stabilized precursor for the spatial atomic layer deposition of copper thin films
Publikation: Beitrag in Fachzeitschrift › Forschungsartikel › Beigetragen › Begutachtung
Beitragende
Abstract
This paper demonstrates a carbene stabilized precursor [Cu(tBuNHC)(hmds)] with suitable volatility, reactivity and thermal stability, that enables the spatial plasma-enhanced atomic layer deposition (APP-ALD) of copper thin films at atmospheric pressure. The resulting conductive and pure copper layers were thoroughly analysed and a comparison of precursor and process with the previously reported silver analogue [Ag(tBuNHC)(hmds)] revealed interesting similarities and notable differences in precursor chemistry and growth characteristics. This first report of APP-ALD grown copper layers is an important starting point for high throughput, low-cost manufacturing of copper films for nano- and optoelectronic devices.
Details
| Originalsprache | Englisch |
|---|---|
| Seiten (von - bis) | 13752-13755 |
| Seitenumfang | 4 |
| Fachzeitschrift | Chemical communications |
| Jahrgang | 56 |
| Ausgabenummer | 89 |
| Publikationsstatus | Veröffentlicht - 18 Nov. 2020 |
| Peer-Review-Status | Ja |
| Extern publiziert | Ja |
Externe IDs
| PubMed | 33063069 |
|---|