Automated Material Handling Systems are highly complex which makes planning, monitoring and optimization a challenging task. Operators of an Automated Material Handling System (AMHS) have access to extensive data from the real system and additional data sources like material flow simulation studies. Until now, these data have mainly been evaluated statically in the form of predefined diagrams and reports. The aim of this article is to present a concept that allows interactive data visualization of semiconductor transport systems from planning up to their operational phase. Thereby the application of approaches from the field of Visual Analytics is of special interest. A high potential for a better understanding of the highly complex AMHS is seen here.