We report on solving of two intriguing issues concerning the inscription of surface relief gratings within azopolymer thin films under irradiation with SS, PP and RL interference patterns. For this, we utilize the orientation approach and viscoplastic modeling in combination with experimental results, where the change in surface topography is acquired in situ during irradiation with modulated light. First, the initial orientation state of polymer backbones is proved to be responsible for the contradictory experimental reports on the efficiency of the SS interference pattern. Different orientation states can influence not only the phase of SS grating but also its height, which is experimentally confirmed by using special pretreatments. Second, the faster growth of gratings inscribed by the RL interference pattern is shown to be promoted by a weak photosoftening effect. Overall, the modeled results are in good agreement with the order of relative growth efficiency: RL–PP–SS.