Ultrashort-Pulsed-Laser Annealing of Amorphous Atomic-Layer-Deposited MoS2 Films

Publikation: Beitrag in FachzeitschriftForschungsartikelBeigetragenBegutachtung

Beitragende

  • Malte Jonas Marius Julian Becher - , Ruhr-Universität Bochum (Autor:in)
  • Julia Jagosz - , Ruhr-Universität Bochum (Autor:in)
  • Rahel Manuela Neubieser - , Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme (Autor:in)
  • Jan Lucas Wree - , Ruhr-Universität Bochum (Autor:in)
  • Anjana Devi - , Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme, Ruhr-Universität Bochum (Autor:in)
  • Marvin Michel - , Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme (Autor:in)
  • Claudia Bock - , Ruhr-Universität Bochum (Autor:in)
  • Evgeny L. Gurevich - , Ruhr-Universität Bochum, FH Münster – University of Applied Sciences (Autor:in)
  • Andreas Ostendorf - , Ruhr-Universität Bochum (Autor:in)

Abstract

To implement 2D molybdenum disulfide (MoS2) in the flexible electronic industry, large, uniform, and crystalline films on flexible substrates are needed. Thermal atomic layer deposition (ALD) generates large-area uniform MoS2 films at low temperatures directly on temperature-sensitive substrates. But if the grown films are amorphous, a high-temperature posttreatment of the whole sample, which may cause thermal degradation of the substrate or other layers, needs to be avoided. In this article, the crystallization of amorphous MoS2 layers deposited by thermal ALD processed with picosecond laser pulses (λ = 532 nm), in a “cold” annealing process, is reported. The laser fluence range varies from (Formula presented.) = 8.73 mJ cm−2 to (Formula presented.) = 18.25 mJ cm−2 with scanning speeds from (Formula presented.) = 240 mm s−1 to (Formula presented.) = 2640 mm s−1. The crystallization and the influence of the processing parameters on the film morphology are analyzed in detail by Raman spectroscopy and scanning electron microscopy. Furthermore, a transition of amorphous MoS2 by laser annealing to self-organized patterns is demonstrated and a possible process mechanism for the ultrashort-pulsed (usp)-laser annealing is discussed. Finally, the usp laser annealed films are compared to thermally and continuous-wave-laser-annealed samples.

Details

OriginalspracheEnglisch
Aufsatznummer2300677
FachzeitschriftAdvanced engineering materials
Jahrgang25
Ausgabenummer21
PublikationsstatusVeröffentlicht - Nov. 2023
Peer-Review-StatusJa
Extern publiziertJa

Schlagworte

Schlagwörter

  • 2D materials, ALDs, annealings, MoS, ultrashort-pulsed lasers