Strain relaxation of GaAs/Ge crystals on patterned Si substrates

Publikation: Beitrag in FachzeitschriftForschungsartikelBeigetragenBegutachtung

Beitragende

Abstract

We report on the mask-less integration of GaAs crystals several microns in size on patterned Si substrates by metal organic vapor phase epitaxy. The lattice parameter mismatch is bridged by first growing 2-mu m-tall intermediate Ge mesas on 8-mu m-tall Si pillars by low-energy plasma enhanced chemical vapor deposition. We investigate the morphological evolution of the GaAs crystals towards full pyramids exhibiting energetically stable {111} facets with decreasing Si pillar size. The release of the strain induced by the mismatch of thermal expansion coefficients in the GaAs crystals has been studied by X-ray diffraction and photoluminescence measurements. The strain release mechanism is discussed within the framework of linear elasticity theory by Finite Element Method simulations, based on realistic geometries extracted from scanning electron microscopy images. (C) 2014 AIP Publishing LLC.

Details

OriginalspracheEnglisch
Aufsatznummer022112
Seitenumfang5
FachzeitschriftApplied Physics Letters
Jahrgang104
PublikationsstatusVeröffentlicht - 13 Jan. 2014
Peer-Review-StatusJa

Externe IDs

Scopus 84893057668

Schlagworte