Resonant 1D MEMS mirror with a total optical scan angle of 180° for automotive LiDAR

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in KonferenzbandBeigetragenBegutachtung

Beitragende

  • Fabian Schwarz - , OQmented GmbH (Autor:in)
  • Frank Senger - , Fraunhofer-Institut für Siliziumtechnologie (Autor:in)
  • Jörg Albers - , Fraunhofer-Institut für Siliziumtechnologie (Autor:in)
  • Pauline Malaurie - , Fraunhofer-Institut für Siliziumtechnologie (Autor:in)
  • Christian Janicke - , OQmented GmbH (Autor:in)
  • Leon Pohl - , OQmented GmbH (Autor:in)
  • Felix Heinrich - , Fraunhofer-Institut für Siliziumtechnologie (Autor:in)
  • DIrk Kaden - , Fraunhofer-Institut für Siliziumtechnologie (Autor:in)
  • Hans Joachim Quenzer - , Fraunhofer-Institut für Siliziumtechnologie (Autor:in)
  • Fabian Lofink - , Fraunhofer-Institut für Siliziumtechnologie (Autor:in)
  • Andreas Bahr - , Christian-Albrechts-Universität zu Kiel (CAU) (Autor:in)
  • Thomas Von Wantoch - , OQmented GmbH (Autor:in)
  • Ulrich Hofmann - , OQmented GmbH (Autor:in)

Abstract

Presented here is the world's first resonant 1D MEMS mirror achieving mechanical scanning angles exceeding ±45° and thus providing a field of view of up to 180°. The MEMS scanner features a 2 mm x 4 mm ellipsoid mirror plate and oscillates at a scan frequency of about 1.5 kHz. Integrated sensors and closed-loop control allow for an accurate position detection below 0.1°. To achieve the scan angles as well as to guarantee long lifetime and reliability, the MEMS mirror is hermetically sealed on wafer level by a dedicated glass cover and operated in vacuum.

Details

OriginalspracheEnglisch
TitelMOEMS and Miniaturized Systems XIX
Redakteure/-innenWibool Piyawattanametha, Wibool Piyawattanametha, Yong-Hwa Park, Hans Zappe
Herausgeber (Verlag)SPIE - The international society for optics and photonics
ISBN (elektronisch)9781510633490
PublikationsstatusVeröffentlicht - 2020
Peer-Review-StatusJa
Extern publiziertJa

Publikationsreihe

ReiheProceedings of SPIE - The International Society for Optical Engineering
Band11293
ISSN0277-786X

Konferenz

TitelMOEMS and Miniaturized Systems XIX 2020
Dauer1 - 3 Februar 2020
StadtSan Francisco
LandUSA/Vereinigte Staaten

Externe IDs

ORCID /0000-0001-8012-6794/work/186621453

Schlagworte

Schlagwörter

  • Large field of view, Large scan angle, LiDAR, MEMS, MEMS-mirror, Micro-mirror, Micro-scanner, MOEMS