Resonant 1D MEMS mirror with a total optical scan angle of 180° for automotive LiDAR
Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/Gutachten › Beitrag in Konferenzband › Beigetragen › Begutachtung
Beitragende
Abstract
Presented here is the world's first resonant 1D MEMS mirror achieving mechanical scanning angles exceeding ±45° and thus providing a field of view of up to 180°. The MEMS scanner features a 2 mm x 4 mm ellipsoid mirror plate and oscillates at a scan frequency of about 1.5 kHz. Integrated sensors and closed-loop control allow for an accurate position detection below 0.1°. To achieve the scan angles as well as to guarantee long lifetime and reliability, the MEMS mirror is hermetically sealed on wafer level by a dedicated glass cover and operated in vacuum.
Details
| Originalsprache | Englisch |
|---|---|
| Titel | MOEMS and Miniaturized Systems XIX |
| Redakteure/-innen | Wibool Piyawattanametha, Wibool Piyawattanametha, Yong-Hwa Park, Hans Zappe |
| Herausgeber (Verlag) | SPIE - The international society for optics and photonics |
| ISBN (elektronisch) | 9781510633490 |
| Publikationsstatus | Veröffentlicht - 2020 |
| Peer-Review-Status | Ja |
| Extern publiziert | Ja |
Publikationsreihe
| Reihe | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Band | 11293 |
| ISSN | 0277-786X |
Konferenz
| Titel | MOEMS and Miniaturized Systems XIX 2020 |
|---|---|
| Dauer | 1 - 3 Februar 2020 |
| Stadt | San Francisco |
| Land | USA/Vereinigte Staaten |
Externe IDs
| ORCID | /0000-0001-8012-6794/work/186621453 |
|---|
Schlagworte
ASJC Scopus Sachgebiete
Schlagwörter
- Large field of view, Large scan angle, LiDAR, MEMS, MEMS-mirror, Micro-mirror, Micro-scanner, MOEMS