Nonvolatile Field-Effect Transistors Using Ferroelectric-Doped HfO2 Films
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Beitragende
Abstract
The discovery of ferroelectricity in hafnium oxide (HfO2) thin films renewed the interest in ferroelectric nonvolatile memories. In particular, not only ferroelectric capacitors but also ferroelectric field-effect transistor based on this material have now become appealing concepts. This is mainly due to robust ferroelectric properties even upon aggressive scaling and to the compatibility with common fabrication processes used in the semiconductor industry. In this chapter, we review the key achievements of HfO2-based FeFETs since their first report in 2012. First, material properties of HfO2 for memory applications are briefly summarized, discussing the impact of doping as well as the electrical switching and reliability characteristics. Then, FeFETs having a 10-nm-thick silicon-doped HfO2 layer in the gate stack are illustrated, and their main figures of merit are discussed, including memory window, write and read operations, endurance and retention aspects as well as parasitic charge trapping. Finally, the integration in advanced technology nodes and the performance of large active memory arrays is shown.
Details
| Originalsprache | Englisch |
|---|---|
| Titel | Ferroelectric-Gate Field Effect Transistor Memories |
| Herausgeber (Verlag) | Springer |
| Seiten | 79-96 |
| Seitenumfang | 18 |
| Auflage | 2 |
| ISBN (elektronisch) | 978-981-15-1212-4 |
| ISBN (Print) | 978-981-15-1214-8 |
| Publikationsstatus | Veröffentlicht - 2020 |
| Peer-Review-Status | Ja |
Publikationsreihe
| Reihe | Topics in Applied Physics (TAP) |
|---|---|
| Band | 131 |
| ISSN | 0303-4216 |
Externe IDs
| ORCID | /0000-0003-3814-0378/work/142256210 |
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