Nonvolatile Field-Effect Transistors Using Ferroelectric-Doped HfO2 Films

Publikation: Beitrag in Buch/Konferenzbericht/Sammelband/GutachtenBeitrag in Buch/Sammelband/GutachtenBeigetragenBegutachtung

Beitragende

  • Uwe Schroeder - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Stefan Slesazeck - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Halid Mulaosmanovic - , NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)
  • Thomas Mikolajick - , Professur für Nanoelektronik, NaMLab - Nanoelectronic materials laboratory gGmbH (Autor:in)

Abstract

The discovery of ferroelectricity in hafnium oxide (HfO2) thin films renewed the interest in ferroelectric nonvolatile memories. In particular, not only ferroelectric capacitors but also ferroelectric field-effect transistor based on this material have now become appealing concepts. This is mainly due to robust ferroelectric properties even upon aggressive scaling and to the compatibility with common fabrication processes used in the semiconductor industry. In this chapter, we review the key achievements of HfO2-based FeFETs since their first report in 2012. First, material properties of HfO2 for memory applications are briefly summarized, discussing the impact of doping as well as the electrical switching and reliability characteristics. Then, FeFETs having a 10-nm-thick silicon-doped HfO2 layer in the gate stack are illustrated, and their main figures of merit are discussed, including memory window, write and read operations, endurance and retention aspects as well as parasitic charge trapping. Finally, the integration in advanced technology nodes and the performance of large active memory arrays is shown.

Details

OriginalspracheEnglisch
TitelFerroelectric-Gate Field Effect Transistor Memories
Herausgeber (Verlag)Springer
Seiten79-96
Seitenumfang18
Auflage2
ISBN (elektronisch)978-981-15-1212-4
ISBN (Print)978-981-15-1214-8
PublikationsstatusVeröffentlicht - 2020
Peer-Review-StatusJa

Publikationsreihe

ReiheTopics in Applied Physics (TAP)
Band131
ISSN0303-4216

Externe IDs

ORCID /0000-0003-3814-0378/work/142256210

Schlagworte

ASJC Scopus Sachgebiete