The synthesis of cadmium stannate (Cd₂SnO₄ CTO) nanoparticle powders and the deposition and patterning of thin Cd ₂SnO₄ films were achieved via a polymeric precursor approach. Conditions for the phase formation of the cubic spinel phase were evaluated, and for the first time the system was obtained in single phase powder form from a precursor system. Thin Cd₂SnO₄ films were prepared by spin coating the polymeric precursor solution followed by thermal treatment. Highly transparent and 20 nm thick films with a minimum sheet resistance of 110 Ohm were prepared. A thermal imprint process with PDMS molds was used for patterning of the films in the sub-micrometre range. Nanostructured CTO films are essential to improve structured electrodes in opto-electronic devices such as CdTe-based thin film solar cells.