Method for forming a crack in the edge region of a donor substrate, using an inclined laser beam

Publikation: Geistiges EigentumPatentanmeldung/Patent

Beitragende

  • Marko Swoboda - , Infineon Technologies AG (Erfinder:in)
  • Christian Beyer - (Erfinder:in)
  • Franz Schilling - (Erfinder:in)
  • Jan Richter - (Erfinder:in)
  • Siltectra GmbH

Abstract

The invention relates to a method for separating solid-body slices (1) from a donor substrate (2). The method comprises the following steps: providing a donor substrate (2), producing at least one modification (10) within the donor substrate (2) by means of at least one LASER beam (12), wherein the LASER beam (12) penetrates the donor substrate (2) via a planar surface (16) of the donor substrate (2), wherein the LASER beam (12) is inclined with respect to the planar surface (16) of the donor substrate (2) such that it penetrates the donor substrate at an angle of not equal to 0° or 180° relative to the longitudinal axis of the donor substrate, wherein the LASER beam (12) is focused in order to produce the modification (10) in the donor substrate (2) and the solid-body slice (1) detaches from the donor substrate (2) as a result of the modifications (10) produced or a stress-inducing layer (14) is produced or arranged on the planar surface (16) of the donor substrate (2) and mechanical stresses are produced in the donor substrate (2) by a thermal treatment of the stress-inducing layer (14), wherein the mechanical stresses produce a crack (20) for separating a solid-body layer (1), which crack propagates along the modifications (10).

Details

The invention relates to a method for separating solid-body slices (1) from a donor substrate (2). The method comprises the following steps: providing a donor substrate (2), producing at least one modification (10) within the donor substrate (2) by means of at least one LASER beam (12), wherein the LASER beam (12) penetrates the donor substrate (2) via a planar surface (16) of the donor substrate (2), wherein the LASER beam (12) is inclined with respect to the planar surface (16) of the donor substrate (2) such that it penetrates the donor substrate at an angle of not equal to 0° or 180° relative to the longitudinal axis of the donor substrate, wherein the LASER beam (12) is focused in order to produce the modification (10) in the donor substrate (2) and the solid-body slice (1) detaches from the donor substrate (2) as a result of the modifications (10) produced or a stress-inducing layer (14) is produced or arranged on the planar surface (16) of the donor substrate (2) and mechanical stresses are produced in the donor substrate (2) by a thermal treatment of the stress-inducing layer (14), wherein the mechanical stresses produce a crack (20) for separating a solid-body layer (1), which crack propagates along the modifications (10).

OriginalspracheEnglisch
IPC (Internationale Patentklassifikation)H01L 31/ 18 A I
VeröffentlichungsnummerUS2018370073
Anmeldedatum23 Juni 2016
Land/GebietUSA/Vereinigte Staaten
Prioritätsdatum23 Juni 2016
PrioritätsnummerWO2016EP64536
PublikationsstatusVeröffentlicht - 27 Dez. 2018
Extern publiziertJa
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Externe IDs

ORCID /0000-0003-2572-1149/work/208796508